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EPI Facilities

EPI TECH | EPI Process | EPI Products | EPI Facilities

Reactor Used

MT7700K & MT7811K with expansion kits
RF Pancake reactor EpiPro5000
Single wafer reactor
LPE3061 & 2061 Reactors

MT Series Reactor capability	Single wafer reactor capability	RF pancake reactor capability
Good surface quality and slip performance Face thickness uniformities of ±4% for 6' wafers Face resistivity uniformities of ±4% for 6' wafers Sharp transition layer with developed recipe Reduced pressure	Outstanding uniformity in thickness and resistivity; Unmatched process capability Thin Epi capability 8' Epi capabilit	High throughput Extremely sharp doping transition Excellent uniformity in thickness and resistivity Large batch sizes and dual-chamber design Thick Epi capability
Epi Facilities

Centura	CSD

LPE 3061	ASM E2000

In-House Measurement Capabilities

Simgui also introduced a set of qualified and advanced metrological and back-up facilities to ensure Simgui's EPI wafers meet, or even exceed, the industry's standards.


MCV530	SSM495Hg-Probe CV System	CDE 4-Point Probe
Surface scan SP1	QS2200M Accent FTIR	ADE 9300
SSM SRP 2000	Agilent ICP MS7500CS	OLYMPUS 公司的(de)MX50

Back-up Facilities

	Ultra-pure water meeting the need for device manufacture at very deep sub-micrometer level.
	Wafer cleaning process operating in Cobra VcS SA(Verteq, USA). The Combination of ultra-dilute chemistries, advanced megasonics, and the VcS process result in highefficiency removal of particle, metal and organic on wafer surface. Additionally, ultra-clean chemical deliver systems from SEMCO(USA) supply Cobra VcS with high purity chemicals.

Simgui adopts four processes: SIMOX, BONDING, SIMBOND, and SSS, and uses advanced equipment to prepare SOI materials to ensure that wafers can meet international semiconductor standards and meet the requirements of mainstream IC production lines in the world today. Relying on strong and continuous technical support, integrating the good cost-effectiveness of domestically produced substrates and the advantages of strong and flexible processing capabilities, we provide professional epitaxial services to customers.